Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6939207 | Method and apparatus for controlling CMP pad surface finish | Mario Stella, Eugene Zhao, Peter Renteln, Jeffrey Farber | 2005-09-06 |
| 6875091 | Method and apparatus for conditioning a polishing pad with sonic energy | Allan M. Radman, Helmuth Treichel, Robert G. Boehm, Jr., Michael S. Lacy, Eric A. Dunton | 2005-04-05 |