Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6930813 | Spatial filter source beam conditioning in ellipsometer and the like systems | Martin M. Liphardt, Blaine D. Johs, Craig M. Herzinger, Ping He | 2005-08-16 |
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam | 2005-02-22 |