Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950182 | Functional equivalent to spatial filter in ellipsometer and the like systems | Martin M. Liphardt, Craig M. Herzinger, Ping He | 2005-09-27 |
| 6940595 | Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters | Jeffrey S. Hale, John A. Woollam, Craig M. Herzinger | 2005-09-06 |
| 6937341 | System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation | John A. Woollam, Galen L. Pfeiffer, Daniel W. Thompson, Craig M. Herzinger | 2005-08-30 |
| 6930813 | Spatial filter source beam conditioning in ellipsometer and the like systems | Martin M. Liphardt, Craig M. Herzinger, Ping He, James D. Welch | 2005-08-16 |
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch | 2005-02-22 |