Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6859278 | Multi-AOI-system for easy changing angles-of-incidence in ellipsometer, polarimeter and reflectometer systems | Blaine D. Johs, Ping He, Martin M. Liphardt, John A. Woollam, James D. Welch | 2005-02-22 |