Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956658 | System and method for measuring object characteristics using phase differences in polarized light reflections | Rusmin Kudinar | 2005-10-18 |
| 6956660 | System and method for measuring properties of an object using a phase difference between two reflected light signals | Rusmin Kudinar | 2005-10-18 |
| 6930765 | Multiple spot size optical profilometer, ellipsometer, reflectometer and scatterometer | Hung Phi Nguyen | 2005-08-16 |
| 6909500 | Method of detecting and classifying scratches, particles and pits on thin film disks or wafers | — | 2005-06-21 |
| 6897957 | Material independent optical profilometer | — | 2005-05-24 |