Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913706 | Double-metal EUV mask absorber | Hsing-Chien Ma, Scott R. Chegwidden | 2005-07-05 |
| 6908714 | Absorber layer for EUV | Guojing Zhang | 2005-06-21 |
| 6905801 | High performance EUV mask | Shoudeng Liang, Guojing Zhang | 2005-06-14 |