Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908714 | Absorber layer for EUV | Pei-Yang Yan | 2005-06-21 |
| 6905801 | High performance EUV mask | Shoudeng Liang, Pei-Yang Yan | 2005-06-14 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6908714 | Absorber layer for EUV | Pei-Yang Yan | 2005-06-21 |
| 6905801 | High performance EUV mask | Shoudeng Liang, Pei-Yang Yan | 2005-06-14 |