Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913706 | Double-metal EUV mask absorber | Pei-Yang Yan, Hsing-Chien Ma | 2005-07-05 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6913706 | Double-metal EUV mask absorber | Pei-Yang Yan, Hsing-Chien Ma | 2005-07-05 |