Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6964919 | Low-k dielectric film with good mechanical strength | Grant Kloster, Lee Rockford | 2005-11-15 |
| 6943121 | Selectively converted inter-layer dielectric | Grant Kloster, David H. Gracias, Lee Rockford, Peter K. Moon, Chris Barns | 2005-09-13 |
| 6924222 | Formation of interconnect structures by removing sacrificial material with supercritical carbon dioxide | Michael Goodner | 2005-08-02 |
| 6903461 | Semiconductor device having a region of a material which is vaporized upon exposing to ultraviolet radiation | Grant Kloster, Hyun-Mog Park | 2005-06-07 |
| 6867125 | Creating air gap in multi-level metal interconnects using electron beam to remove sacrificial material | Grant Kloster, Hyun-Mog Park | 2005-03-15 |
| 6846755 | Bonding a metal component to a low-k dielectric material | Grant Kloster | 2005-01-25 |