Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932674 | Method of determining the endpoint of a planarization process | Olaf Kuehn, Andreas Roemer, Alexander William Simpson | 2005-08-23 |
| 6893968 | Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices | Alexander William Simpson | 2005-05-17 |