Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6932674 | Method of determining the endpoint of a planarization process | Peter Lahnor, Olaf Kuehn, Alexander William Simpson | 2005-08-23 |
| 6858449 | Process and device for the abrasive machining of surfaces, in particular semiconductor wafers | Mark Hollatz | 2005-02-22 |