Issued Patents 2005
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977405 | Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it | Jorn Lutzen, Bernd Goebel, Dirk Schumann, Harald Seidl, Martin Popp +2 more | 2005-12-20 |
| 6953722 | Method for patterning ceramic layers | Harald Seidl, Thomas Hecht, Stefan Jakschik, Stephan Kudelka, Uwe Schroder +1 more | 2005-10-11 |
| 6949269 | Method for producing vertical patterned layers made of silicon dioxide | Harald Seidl | 2005-09-27 |
| 6916704 | Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor | Bernhard Sell, Annette Sanger, Harald Seidl | 2005-07-12 |
| 6852640 | Method for fabricating a hard mask | — | 2005-02-08 |
| 6849153 | Removal of post-rie polymer on A1/CU metal line | Ravikumar Ramachandran, Wesley C. Natzle, Hiroyuki Akatsu, Chien-Yi Yu | 2005-02-01 |