Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6977405 | Semiconductor memory with memory cells comprising a vertical selection transistor and method for fabricating it | Jorn Lutzen, Bernd Goebel, Dirk Schumann, Martin Gutsche, Martin Popp +2 more | 2005-12-20 |
| 6953722 | Method for patterning ceramic layers | Martin Gutsche, Thomas Hecht, Stefan Jakschik, Stephan Kudelka, Uwe Schroder +1 more | 2005-10-11 |
| 6949269 | Method for producing vertical patterned layers made of silicon dioxide | Martin Gutsche | 2005-09-27 |
| 6916704 | Multiple deposition of metal layers for the fabrication of an upper capacitor electrode of a trench capacitor | Martin Gutsche, Bernhard Sell, Annette Sanger | 2005-07-12 |
| 6853023 | Semiconductor memory cell configuration and a method for producing the configuration | Bernd Goebel, Jorn Lutzen, Martin Popp | 2005-02-08 |