Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography | Christian Ebi, Frank Erber, Torsten Franke, Fritz Gans, Tarek Lutz +1 more | 2005-10-11 |
| 6919147 | Production method for a halftone phase mask | Josef Mathuni | 2005-07-19 |