Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6919147 | Production method for a halftone phase mask | Günther Ruhl | 2005-07-19 |
JM
Josef Mathuni
Overall (2005): #170,203 of 245,428Top 70%
1
Patents 2005