Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953644 | Method for compensating for scatter/reflection effects in particle beam lithography | Christian Ebi, Frank Erber, Torsten Franke, Tarek Lutz, Günther Ruhl +1 more | 2005-10-11 |