Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6979518 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, S. Jay Chey, Michael S. Hibbs, Robert N. Lang +1 more | 2005-12-27 |
| 6858357 | Attenuated embedded phase shift photomask blanks | Marie Angelopoulos, Katherina Babich, Cameron Brooks, S. Jay Chey, C. Richard Guarnieri +1 more | 2005-02-22 |