Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6953938 | Deflector, method of manufacturing deflector, and charged particle beam exposure apparatus | Yuichi Iwasaki, Masato Muraki, Kenji Tamamori, Kouji Asano, Masayoshi Esashi +2 more | 2005-10-11 |