Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6876445 | Method for analyzing defect data and inspection apparatus and review system | Yuji Takagi | 2005-04-05 |
| 6870169 | Method and apparatus for analyzing composition of defects | Kenji Obara, Yuji Takagi, Naoki Hosoya | 2005-03-22 |