Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969676 | Method of adjusting etch selectivity by adapting aspect ratios in a multi-level etch process | Christoph Schwan, Volker Grimm | 2005-11-29 |
| 6879871 | Advanced process control for a manufacturing process of a plurality of products with minimized control degradation after re-initialization upon occurrence of reset events | Jan Raebiger, Andre Holfeld | 2005-04-12 |
| 6875676 | Methods for producing a highly doped electrode for a field effect transistor | Karsten Wieczorek, Falk Graetsch | 2005-04-05 |
| 6838010 | System and method for wafer-based controlled patterning of features with critical dimensions | Carsten Hartig | 2005-01-04 |