Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969676 | Method of adjusting etch selectivity by adapting aspect ratios in a multi-level etch process | Gunter Grasshoff, Volker Grimm | 2005-11-29 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6969676 | Method of adjusting etch selectivity by adapting aspect ratios in a multi-level etch process | Gunter Grasshoff, Volker Grimm | 2005-11-29 |