Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6936383 | Method of defining the dimensions of circuit elements by using spacer deposition techniques | Martin Mazur, Georg Sulzer | 2005-08-30 |
| 6838010 | System and method for wafer-based controlled patterning of features with critical dimensions | Gunter Grasshoff | 2005-01-04 |