Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905964 | Method of fabricating self-aligned metal barriers by atomic layer deposition on the copper layer | Boon Kiat Lim | 2005-06-14 |
| 6899857 | Method for forming a region of low dielectric constant nanoporous material using a microemulsion technique | Soo Choi Pheng, Lap Chan, Wang Cui Yang, Siew Yong Kong | 2005-05-31 |
| 6897118 | Method of multiple pulse laser annealing to activate ultra-shallow junctions | Chyiu Hyia Poon, Byung Jin Cho, Yong Lu, Mousumi Bhat | 2005-05-24 |
| 6890854 | Method and apparatus for performing nickel salicidation | Pooi See Lee, Kin Leong Pey, Lap Chan | 2005-05-10 |
| 6878623 | Technique to achieve thick silicide film for ultra-shallow junctions | Cheng Tan, Randall Cher Liang Cha, Lap Chan | 2005-04-12 |