Issued Patents 2005
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947518 | X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device | Kenji Itoga, Toyoki Kitayama, Shunichi Uzawa | 2005-09-20 |
| 6947519 | X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure | Kenji Itoga, Shunichi Uzawa, Toyoki Kitayama | 2005-09-20 |
| 6919734 | Cooling fin connected to a cooling unit and a pusher of the testing apparatus | Noboru Saito, Hiroyuki Takahashi, Noriyuki Igarashi, Keiichi Fukumoto, Hiroto Nakamura +1 more | 2005-07-19 |
| 6867843 | Debris removing system for use in X-ray light source | Nobuaki Ogushi, Akira Miyake | 2005-03-15 |
| 6847696 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Akira Miyake, Nobuaki Oqushi | 2005-01-25 |