Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6947518 | X-ray exposure apparatus, X-ray exposure method, X-ray mask, X-ray mirror, synchrotron radiation apparatus, synchrotron radiation method and semiconductor device | Kenji Itoga, Toyoki Kitayama, Yutaka Watanabe | 2005-09-20 |
| 6947519 | X-ray exposure apparatus and method, semiconductor manufacturing apparatus, and microstructure | Kenji Itoga, Yutaka Watanabe, Toyoki Kitayama | 2005-09-20 |