Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897456 | Differential pumping system and exposure apparatus | Takayuki Hasegawa, Nobuaki Ogushi | 2005-05-24 |
| 6891172 | Differential pumping system and exposure apparatus | Nobuaki Ohgushi, Takayuki Hasegawa, Jun Ito | 2005-05-10 |
| 6867843 | Debris removing system for use in X-ray light source | Nobuaki Ogushi, Yutaka Watanabe | 2005-03-15 |
| 6847696 | Synchrotron radiation measurement apparatus, X-ray exposure apparatus, and device manufacturing method | Hideyuki Chinju, Yutaka Watanabe, Nobuaki Oqushi | 2005-01-25 |