Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6950175 | System, method, and apparatus for a magnetically levitated and driven reticle-masking blade stage mechanism | Daniel N. Galburt, Stephen Roux | 2005-09-27 |
| 6906789 | Magnetically levitated and driven reticle-masking blade stage mechanism having six degrees freedom of motion | Daniel N. Galburt, Stephen Roux | 2005-06-14 |