Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905940 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Xinyua Xia, Zheng Yuan | 2005-06-14 |
| 6843882 | Gas flow control in a wafer processing system having multiple chambers for performing same process | Karthik Janakiraman, Victor Wang, Vikash Banthia, Teresa Winson | 2005-01-18 |