Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6905939 | Process for forming silicon oxide material | Xinyun Xia | 2005-06-14 |
| 6905940 | Method using TEOS ramp-up during TEOS/ozone CVD for improved gap-fill | Nitin K. Ingle, Xinyua Xia | 2005-06-14 |