Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6843882 | Gas flow control in a wafer processing system having multiple chambers for performing same process | Karthik Janakiraman, Victor Wang, Vikash Banthia, Nitin K. Ingle | 2005-01-18 |