Issued Patents 2005
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852202 | Small epicyclic magnetron with controlled radial sputtering profile | James Tsung, Daniel C. Lubben, Ilyoung Richard Hong, Peijun Ding | 2005-02-08 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852202 | Small epicyclic magnetron with controlled radial sputtering profile | James Tsung, Daniel C. Lubben, Ilyoung Richard Hong, Peijun Ding | 2005-02-08 |