Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6852202 | Small epicyclic magnetron with controlled radial sputtering profile | Michael Miller, James Tsung, Daniel C. Lubben, Peijun Ding | 2005-02-08 |
| 6841050 | Small planetary magnetron | James Tsung, Daniel C. Lubben, Peijun Ding, Nirmalya Maity | 2005-01-11 |