Issued Patents 2005
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956223 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Theodore H. Smick, Frank D. Roberts, II, Marvin Farley, Geoffrey Ryding, Takao Sakase +2 more | 2005-10-18 |
| 6908836 | Method of implanting a substrate and an ion implanter for performing the method | Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase, Marvin Farley +2 more | 2005-06-21 |
| 6847043 | Ion sources for ion implantation apparatus | Richard Goldberg, Christopher Burgess, David George Armour, Erik J. H. Collart | 2005-01-25 |