Issued Patents 2005
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6897457 | Apparatus and method for monitoring and tuning an ion beam in ion implantation apparatus | Andrew Holmes, David R. Burgin, Simon Povall, Drew Arnold | 2005-05-24 |
| 6847043 | Ion sources for ion implantation apparatus | Adrian Murrell, Richard Goldberg, Christopher Burgess, Erik J. H. Collart | 2005-01-25 |