Issued Patents 2005
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6956223 | Multi-directional scanning of movable member and ion beam monitoring arrangement therefor | Theodore H. Smick, Frank D. Roberts, II, Marvin Farley, Takao Sakase, Adrian Murrell +2 more | 2005-10-18 |
| 6908836 | Method of implanting a substrate and an ion implanter for performing the method | Adrian Murrell, Bernard Harrison, Peter Edwards, Peter Kindersley, Takao Sakase +2 more | 2005-06-21 |
| 6878946 | Indirectly heated button cathode for an ion source | Marvin Farley, Takao Sakase, Shu Satoh, Peter Rose, Christos Christou | 2005-04-12 |
| 6864494 | Semiconductor processing apparatus having a moving member and a force compensator therefor | — | 2005-03-08 |