Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor | 2004-12-28 |
| 6792076 | Target steering system for EUV droplet generators | Michael B. Petach, Rocco A. Orsini | 2004-09-14 |