Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Mark E. Michaelian, Henry Shields, Steven W. Fornaca | 2004-12-28 |
| 6738452 | Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source | Robert A. Bunnell, Michael B. Petach, Rocco A. Orsini | 2004-05-18 |