Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Michael B. Petach, Mark E. Michaelian, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2004-12-28 |
| 6792076 | Target steering system for EUV droplet generators | Michael B. Petach, Steven W. Fornaca | 2004-09-14 |
| 6744851 | Linear filament array sheet for EUV production | Michael B. Petach | 2004-06-01 |
| 6738452 | Gasdynamically-controlled droplets as the target in a laser-plasma extreme ultraviolet light source | Roy D. McGregor, Robert A. Bunnell, Michael B. Petach | 2004-05-18 |