Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2004-12-28 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835944 | Low vapor pressure, low debris solid target for EUV production | Rocco A. Orsini, Michael B. Petach, Henry Shields, Roy D. McGregor, Steven W. Fornaca | 2004-12-28 |