Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6709544 | Chemical mechanical polishing equipment | Chia-Lin Hsu, Hsueh-Chung Chen, Shih-Hsun Hsu | 2004-03-23 |
| 6706140 | Control system for in-situ feeding back a polish profile | Chia-Lin Hsu, Teng-Chun Tsai | 2004-03-16 |
| 6696361 | Post-CMP removal of surface contaminants from silicon wafer | Teng-Chun Tsai, Chia-Lin Hsu, Yung-Tsung Wei | 2004-02-24 |