Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831013 | Method of forming a dual damascene via by using a metal hard mask layer | Chia-Lin Hsu | 2004-12-14 |
| 6706140 | Control system for in-situ feeding back a polish profile | Chia-Lin Hsu, Shao-Chung Hu | 2004-03-16 |
| 6696361 | Post-CMP removal of surface contaminants from silicon wafer | Shao-Chung Hu, Chia-Lin Hsu, Yung-Tsung Wei | 2004-02-24 |