Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797190 | Wafer carrier assembly for a chemical mechanical polishing apparatus and a polishing method using the same | Chia-Lin Hsu, Art Yu, Hsueh-Chung Chen | 2004-09-28 |
| 6709544 | Chemical mechanical polishing equipment | Shao-Chung Hu, Chia-Lin Hsu, Hsueh-Chung Chen | 2004-03-23 |