Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721628 | Closed loop concentration control system for chemical mechanical polishing slurry | Juen-Kuen Lin, Huang-Yi Li, Kevin Yu | 2004-04-13 |
| 6682399 | Pressure monitoring system for chemical-mechanical polishing | Jung-Nan Tseng, Huang-Yi Lin, Kevin Yu | 2004-01-27 |
| 6676801 | Pressure suppression device for chemical mechanical polishing machine and method thereof | Jung-Nan Tseng, Huang-Yi Lin, Fu-Yang Yu | 2004-01-13 |