Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6682399 | Pressure monitoring system for chemical-mechanical polishing | Chien-Hsin Lai, Jung-Nan Tseng, Kevin Yu | 2004-01-27 |
| 6676801 | Pressure suppression device for chemical mechanical polishing machine and method thereof | Chien-Hsin Lai, Jung-Nan Tseng, Fu-Yang Yu | 2004-01-13 |