Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721628 | Closed loop concentration control system for chemical mechanical polishing slurry | Chien-Hsin Lai, Juen-Kuen Lin, Huang-Yi Li | 2004-04-13 |
| 6682399 | Pressure monitoring system for chemical-mechanical polishing | Chien-Hsin Lai, Jung-Nan Tseng, Huang-Yi Lin | 2004-01-27 |