Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721628 | Closed loop concentration control system for chemical mechanical polishing slurry | Chien-Hsin Lai, Juen-Kuen Lin, Kevin Yu | 2004-04-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6721628 | Closed loop concentration control system for chemical mechanical polishing slurry | Chien-Hsin Lai, Juen-Kuen Lin, Kevin Yu | 2004-04-13 |