Issued Patents 2004
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824363 | Linear inductive plasma pump for process reactors | Andrej Mitrovic | 2004-11-30 |
| 6825090 | Fluid dielectric variable capacitor | — | 2004-11-30 |
| 6819053 | Hall effect ion source at high current density | — | 2004-11-16 |
| 6812646 | Method and device for attenuating harmonics in semiconductor plasma processing systems | Thomas Windhorn, Andrej Mitrovic | 2004-11-02 |
| 6811611 | Esrf source for ion plating epitaxial deposition | — | 2004-11-02 |
| 6806650 | Structure and the method for measuring the spectral content of an electric field as a function of position inside a plasma | Thomas Windhorn | 2004-10-19 |
| 6790487 | Active control of electron temperature in an electrostatically shielded radio frequency plasma source | — | 2004-09-14 |
| 6767698 | High speed stripping for damaged photoresist | — | 2004-07-27 |
| 6758948 | Method and apparatus for depositing films | — | 2004-07-06 |
| 6757673 | Displaying hierarchial relationship of data accessed via subject index | Eric J. Makus, Robert L. Usibelli, Sean M. Usibelli, Edwin Thorne, III | 2004-06-29 |
| 6741944 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Joseph T. Verdeyen, Murray D. Sirkis | 2004-05-25 |
| 6740853 | Multi-zone resistance heater | Eric J. Strang | 2004-05-25 |
| 6740842 | Radio frequency power source for generating an inductively coupled plasma | Leonard G. West | 2004-05-25 |
| 6729850 | Applied plasma duct system | Raphael A. Dandl, Bill Quon, Samuel Antley, Andrej Mitrovic | 2004-05-04 |
| 6713969 | Method and apparatus for determination and control of plasma state | Murray D. Sirkis, Andrej Mitrovic, Eric J. Strang | 2004-03-30 |
| 6690568 | Fluid dielectric variable capacitor | — | 2004-02-10 |