Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6806653 | Method and structure to segment RF coupling to silicon electrode | Andrej Mitrovic | 2004-10-19 |
| 6806949 | Monitoring material buildup on system components by optical emission | Audunn Ludviksson | 2004-10-19 |
| 6753498 | Automated electrode replacement apparatus for a plasma processing system | Murray D. Sirkis, Yu Wang Bibby, John Cronin | 2004-06-22 |
| 6740853 | Multi-zone resistance heater | Wayne Johnson | 2004-05-25 |
| 6713969 | Method and apparatus for determination and control of plasma state | Murray D. Sirkis, Wayne Johnson, Andrej Mitrovic | 2004-03-30 |
| 6674241 | Plasma processing apparatus and method of controlling chemistry | Paul Moroz | 2004-01-06 |