Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799532 | Stabilized oscillator circuit for plasma density measurement | Joseph T. Verdeyen | 2004-10-05 |
| 6753498 | Automated electrode replacement apparatus for a plasma processing system | Eric J. Strang, Yu Wang Bibby, John Cronin | 2004-06-22 |
| 6741944 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Joseph T. Verdeyen, Wayne Johnson | 2004-05-25 |
| 6713969 | Method and apparatus for determination and control of plasma state | Wayne Johnson, Andrej Mitrovic, Eric J. Strang | 2004-03-30 |