Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6799532 | Stabilized oscillator circuit for plasma density measurement | Murray D. Sirkis | 2004-10-05 |
| 6791280 | System and method for generating a discharge in high pressure gases | Ju Gao | 2004-09-14 |
| 6741944 | Electron density measurement and plasma process control system using a microwave oscillator locked to an open resonator containing the plasma | Wayne Johnson, Murray D. Sirkis | 2004-05-25 |